公开(公告)号：US20250079135A1

公开(公告)日：2025-03-06

申请号：US18739197

申请日：2024-06-10

Applicant: Samsung Display Co., Ltd.

Inventor： Jun Hyeuk KO ,  Jong Bum KIM ,  Young Kwang LEE ,  Min Goo KANG ,  Suk Ha RYU ,  Min Chul SONG ,  Min A WOO

IPC: H01J37/32 ,  C23C14/04 ,  C23C14/50

Abstract: A deposition apparatus including: a base substrate; an electrostatic chuck on the base substrate; and a plate on the electrostatic chuck. The plate has a first area in which first magnet units are arranged and a second area in which second magnet units are arranged. The first magnet units are spaced apart from each other at a first distance, and the second magnet units are spaced apart from each other at a second distance. The second distance is greater than the first distance.