公开(公告)号：US20200035920A1

公开(公告)日：2020-01-30

申请号：US16427091

申请日：2019-05-30

Applicant: Samsung Display Co., Ltd.

Inventor： Sangjin HAN ,  Junha PARK ,  Eugene KANG ,  Dongwook KIM ,  Cheollae ROH ,  Jaewan SEOL ,  Seongho JEONG ,  Myungsoo HUH ,  Mingyu SEO

IPC: H01L51/00 ,  C23C14/04 ,  C23C14/24 ,  C23C14/54 ,  H01L51/56 ,  H01L21/66 ,  H01L27/32

Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a plurality of source units outside the chamber, wherein the plurality of source units which accommodate a deposition material and transform the deposition material into gas; a nozzle unit in the chamber, wherein the nozzle unit is connected to the plurality of source units and injects, into the chamber, the deposition material supplied from one of the plurality of source units; and a regulating unit between each of the plurality of source units and the nozzle unit, wherein the regulating unit interrupts the deposition material supplied from each of the plurality of source units to the nozzle unit and selectively connects the plurality of source units with the nozzle unit.

公开(公告)号：US20190226084A1

公开(公告)日：2019-07-25

申请号：US16254699

申请日：2019-01-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sangjin HAN ,  Myungsoo HUH ,  Eugene KANG ,  Junha PARK ,  Seongho JEONG ,  Jiyoung CHOUNG

IPC: C23C16/455

Abstract: A deposition apparatus includes: a vacuum chamber in which a deposition process is performable; connected to the vacuum chamber: vaporizers in which are vaporizable different deposition materials; and a mixing chamber in which the vaporized different deposition materials are mixable; and within the vacuum chamber: a substrate support on which is supportable a substrate on which the mixed vaporized different deposition materials are deposited in the deposition process; and a spray nozzle which is connected to the mixing chamber and from which the mixed vaporized different deposition materials are sprayable to the substrate in the deposition process. The spray nozzle includes nozzles arranged in a plurality of lines.