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公开(公告)号:US20240351328A1
公开(公告)日:2024-10-24
申请号:US18437010
申请日:2024-02-08
Applicant: Samsung Display Co., Ltd.
Inventor: JUNGWOOK KIM , HYUNJIN KIM , Kyounghee PARK , JIYUN BANG , SANGMOO LEE , TAE-HO LEE
CPC classification number: B41F23/0406 , B41F19/001 , B41F19/007 , B41P2251/10
Abstract: A light irradiation module includes: a stage on which a substrate and a coating layer on the substrate are seated, and which is configured to move in a first direction; a body on the stage; a light-emitting element in a center of the body, and configured to emit light onto the stage; a first suction tube adjacent to the light-emitting element in a second direction crossing the first direction; a duct connected to the first suction tube; and a suction pump connected to the duct, and configured to supply a negative pressure having an absolute value proportional to an intensity of the light to the first suction tube.