公开(公告)号：US20230403890A1

公开(公告)日：2023-12-14

申请号：US18100208

申请日：2023-01-23

Applicant: Samsung Display Co., Ltd.

Inventor： YOUNGOK PARK ,  WONCHUL SHIN ,  CHUNGHAN SHIM ,  DONGHWAN LEE ,  SANGYOUNG LIM

IPC: H10K59/124 ,  H10K59/12

CPC classification number: H10K59/124 ,  H10K59/1201

Abstract: A display device includes a base substrate, a first active pattern disposed on a base substrate, a second active pattern disposed on a first active pattern and including a material different from a material of a first active pattern, and an interlayer insulating layer disposed on a second active pattern and having Si—O bonds and Si—F bonds on a surface thereof, where a contact hole is defined through the interlayer insulating layer. The number of the Si—O bonds on the surface of the interlayer insulating layer is greater than the number of the Si—F bonds on the surface of the interlayer insulating layer.