公开(公告)号：US20240332053A1

公开(公告)日：2024-10-03

申请号：US18501970

申请日：2023-11-03

Applicant: Samsung Electronics Co., LTD.

Inventor： HOCHAN LEE ,  Youngon Oh ,  Sanghyuk Park

IPC: H01L21/677

CPC classification number: H01L21/67706 ,  H01L21/67733 ,  H01L21/67769

Abstract: A rotational interface includes a base column extending in a first direction, a rotary unit, and a carrier plate extending from the base column in a second direction and connected to the rotary unit, the carrier plate includes a plate body extending in the second direction and coupled to the base column, and a storage pot disposed on the plate body and having an upper surface, and the storage pot includes a fixing pin located on the upper surface of the storage pot and that fixes a semiconductor carrier to the plate body.