公开(公告)号：US20210153333A1

公开(公告)日：2021-05-20

申请号：US17158380

申请日：2021-01-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ho YU ,  Chae-mook LIM ,  Sung-ho JANG ,  Min-seok CHOI

IPC: H05G2/00 ,  G03F7/20

Abstract: An extreme ultraviolet (EUV) light concentrating apparatus including a main body having a concave inner portion and configured to rotate, a tin generator configured to generate tin drops and spray the tin drops, a tin catcher configured to process the sprayed tin drops, a protective cover configured to block the tin drops from falling into the main body, and a rotation guide configured to rotate the main body may be provided.