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公开(公告)号:US12234400B2
公开(公告)日:2025-02-25
申请号:US18098847
申请日:2023-01-19
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Changjun Park , Jaesung Lee , Junghun Lim , Jungmin Oh , Sangwon Bae , Hyosan Lee
IPC: C09K13/10 , C09K13/08 , H01L21/306 , H10B12/00
Abstract: An etchant composition for etching a silicon germanium film includes, based on a total weight of the etchant composition, about 5 wt % to about 14 wt % of an oxidant, about 0.01 wt % to about 5 wt % of a fluorine compound, about 0.01 wt % to about 5 wt % of an amine compound, about 0.01 wt % to about 1 wt % of an alcohol compound having a hydrophilic head and a hydrophobic tail, about 60 wt % to about 90 wt % of an organic solvent, and a balance of water. A method of manufacturing an integrated circuit device includes: forming, on a substrate, a structure in which a plurality of silicon films and a plurality of silicon germanium films are alternately stacked; and selectively removing the plurality of silicon germanium films by using the etchant composition.
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公开(公告)号:US11741886B2
公开(公告)日:2023-08-29
申请号:US17712687
申请日:2022-04-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Seunghyun Song , Sangtae Han , Huigyeong Ahn , Changsun Kang , Mijin Kim , Seongjun Kim , Changjun Park , Seunghee Oh , Kyoree Lee , Mihyun Lee
IPC: G09G3/32
CPC classification number: G09G3/32 , G09G2300/0408 , G09G2300/0439 , G09G2310/0275
Abstract: A display apparatus is provided. The display apparatus includes a substrate having a data line disposed thereon, a plurality of pixel modules arranged in a matrix format on the substrate, and a driver providing a digital data signal through the data line to each of the pixel modules. Each of the pixel modules may include a light emitting layer in which a plurality of light emitting diode (LED) devices form a pixel, a driving layer comprising a display driver integrated circuit (DDI) below the light emitting layer and generating a driving signal to drive the LED devices, and a substrate layer, between the driving layer and the substrate, comprising a data input pad to receive the data signal and transmit the data signal to the DDI and a data output pad to provide the data signal to another adjacent pixel module.
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