公开(公告)号：US20210265397A1

公开(公告)日：2021-08-26

申请号：US17240120

申请日：2021-04-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae-han HAN ,  Sun-hyun KIM ,  Han-seok KIM ,  Chung-ho SONG ,  Gyeong-hee LEE ,  Hee-geun JEONG

IPC: H01L27/146 ,  H01L23/522

Abstract: An image sensor includes a semiconductor substrate having a first surface and a second surface, a pixel element isolation film extending through an interior of the semiconductor substrate and defining a plurality of active pixels in the semiconductor substrate, and a dummy element isolation film extending through the interior of the semiconductor substrate and extending along at least one side of the active pixels in a plan view and defining a plurality of dummy pixels in the semiconductor substrate. The pixel element isolation film may have a first end that is substantially coplanar with the first surface and has a first width in a first direction parallel to the first surface, and the dummy element isolation film has a first end that is substantially coplanar with the first surface and has a second width that is greater than the first width of the pixel element isolation film.

公开(公告)号：US20200075643A1

公开(公告)日：2020-03-05

申请号：US16558820

申请日：2019-09-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae-han HAN ,  Sun-hyun KIM ,  Han-seok KIM ,  Chung-ho SONG ,  Gyeong-hee LEE ,  Hee-geun JEONG

IPC: H01L27/146

Abstract: An image sensor includes a semiconductor substrate having a first surface and a second surface, a pixel element isolation film extending through an interior of the semiconductor substrate and defining a plurality of active pixels in the semiconductor substrate, and a dummy element isolation film extending through the interior of the semiconductor substrate and extending along at least one side of the active pixels in a plan view and defining a plurality of dummy pixels in the semiconductor substrate. The pixel element isolation film may have a first end that is substantially coplanar with the first surface and has a first width in a first direction parallel to the first surface, and the dummy element isolation film has a first end that is substantially coplanar with the first surface and has a second width that is greater than the first width of the pixel element isolation film.