公开(公告)号：US09151962B2

公开(公告)日：2015-10-06

申请号：US13773736

申请日：2013-02-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun Jae Lee ,  Myoung Ki Ahn ,  Kwang Soo Kim ,  In Ho Seo ,  Chang Hoon Choi

IPC: G02B27/40 ,  G02B7/38 ,  G02B3/10

CPC classification number: G02B27/40 ,  G02B3/10 ,  G02B7/38

Abstract: An autofocus control apparatus includes a beam splitter, a condenser lens and a detector. The beam splitter directs light beams from a light source toward a sample and passes light beams reflected from the sample to the condenser lens. The condenser lens condenses the light beams, and the detector detects a focal point deviation of the sample relative to a focal point of the condenser lens. The focal point deviation is detected based on an intersection of a focal line passing through different focal points of the condenser lens and a light receiving plane configured to receive the light beams passing through the condenser lens.

Abstract translation: 自动对焦控制装置包括分束器，聚光透镜和检测器。 分束器将来自光源的光束引向样品，并将从样品反射的光束传递到聚光透镜。 聚光透镜冷凝光束，并且检测器检测样品相对于聚光透镜的焦点的焦点偏差。 基于通过聚光透镜的不同焦点的焦点线和被配置为接收通过聚光透镜的光束的受光面的交点，检测焦点偏差。