公开(公告)号：US12272535B2

公开(公告)日：2025-04-08

申请号：US17673903

申请日：2022-02-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Se Jin Oh ,  Doo Young Gwak ,  Tae Hyun Kim ,  Sang Ki Nam ,  Jae Ho Jang ,  Jin Kyou Choi

IPC: H01J37/32 ,  H01L21/3065

Abstract: A spectroscopic analysis method having improved accuracy and correlation, a method for fabricating a semiconductor device using the same, and a substrate process system using the same are provided. The spectroscopic analysis method includes receiving plasma light emitted from plasma to generate an emission spectrum, detecting n (here, n is a natural number of 2 or more) peak wavelengths from the emission spectrum, generating a plurality of correlation factor time series from correlation factors between the peak wavelengths, filtering the plurality of correlation factor time series, and analyzing the plasma, using the filtered correlation factor time series.

公开(公告)号：US11445876B2

公开(公告)日：2022-09-20

申请号：US16641361

申请日：2018-08-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yeon Su Kim ,  Jae Won Choi ,  Jae Ho Jang ,  Seung Wook Suh

IPC: A47L9/04 ,  A47L9/24 ,  A47L5/26 ,  A47L5/30 ,  A47L9/00 ,  A47L9/16

Abstract: The present disclosure relates to a cleaner including an improved structure to enable self-standing. The cleaner includes a head main body including a brush, a main wheel coupled to the head main body to be positioned in the rear of the brush, a suction pipe disposed between the brush and the main wheel to enable self-standing, a connector configured to connect the suction pipe and the head main body, and a hose having an elasticity such that the suction pipe maintains a self-standing state and disposed between the head main body and the connector.