公开(公告)号：US10431505B2

公开(公告)日：2019-10-01

申请号：US15429525

申请日：2017-02-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jun-bum Park ,  Kyung-sik Kang ,  Byeong-hwan Jeon ,  Jae-chol Joo ,  Tae-joong Kim

IPC: G01J3/42 ,  H01L21/66 ,  G01N21/27 ,  G01N21/95 ,  G01N21/956 ,  H01L21/3205 ,  G01N21/552 ,  G01J3/28 ,  G01N21/25

Abstract: Manufacturing a device may include inspecting a surface of an inspection target device. The inspecting may include forming a metal layer on a surface of the inspection target device on which a minute pattern is formed, directing a beam of light to be incident and normal to the surface of the inspection target device, determining a spectrum of light reflected from the surface of the inspection target device, and generating, via the spectrum, information associated with a structural characteristic of the minute pattern formed on the inspection target device. The inspection target device may be selectively incorporated into the manufactured device based on the generated information.