公开(公告)号：US20240211668A1

公开(公告)日：2024-06-27

申请号：US18498315

申请日：2023-10-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Joosung LEE ,  Jinwoo KIM ,  Bogyeong KANG ,  Jaemyung CHOE

IPC: G06F30/3308 ,  G06F30/31

CPC classification number: G06F30/3308 ,  G06F30/31 ,  G06F2119/10

Abstract: A method of augmenting training data for a semiconductor process modeling includes obtaining a simulation input data set and a measurement data set, obtaining a simulation output data set generated based on performing simulation based on the simulation input data set, extracting reference noise information associated with the measurement data set from the measurement data set, extracting distribution information associated with each simulation case included in the simulation output data set based on synthesizing the reference noise information and the simulation output data set, generating a noise simulation data set based on sampling data based on the distribution information, and generating a synthesized data set based on synthesizing the simulation input data set, the noise simulation data set, and the measurement data set.