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公开(公告)号:US11575014B2
公开(公告)日:2023-02-07
申请号:US17227848
申请日:2021-04-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Deok Han Bae , Sung Min Kim , Ju Hun Park , Myung Yoon Um , Jong Mil Youn
IPC: H01L29/417 , H01L29/40 , H01L29/06 , H01L29/66
Abstract: A semiconductor device is provided. The semiconductor device includes a substrate comprising an element isolation region and an active region defined by the element isolation region, a fin-type pattern on the active region, the fin-type pattern extending in a first horizontal direction, a gate electrode on the fin-type pattern, the gate electrode extending in a second horizontal direction that crosses the first horizontal direction, a capping pattern on the gate electrode, a source/drain region on at least one side of the gate electrode, a source/drain contact on the source/drain region and electrically connected to the source/drain region, and a filling insulating layer on the source/drain contact, the filling insulating layer having a top surface at a same level as a top surface of the capping pattern, and including a material containing a carbon (C) atom.