公开(公告)号：US20190065630A1

公开(公告)日：2019-02-28

申请号：US15901358

申请日：2018-02-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seong Ryeol KIM ,  Jeong Hoon KO ,  Seong Je KIM ,  Je Hyun LEE ,  Jong Wook JEON

IPC: G06F17/50 ,  G06N3/08 ,  G06F17/18 ,  G06N3/04 ,  H01L27/02

Abstract: A yield prediction apparatus is provided. The yield prediction apparatus may include at least one processor coupled to at least one non-transitory computer-readable medium. The at least one processor may be configured to receive a first variable associated with operating characteristics of a semiconductor device, perform a simulation for the operating characteristics of the semiconductor device, perform a neural network regression analysis using a result of the simulation to determine a first function for the first variable, and predict a yield of the semiconductor integrated circuit based on an advanced Monte Carlo simulation. An input of the advanced Monte Carlo simulation may include the determined first function.