公开(公告)号：US20140291607A1

公开(公告)日：2014-10-02

申请号：US14147871

申请日：2014-01-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sang-woo KIM ,  Kang-Hyuck LEE

IPC: H01L29/16

CPC classification number: H01L29/1606 ,  H01L29/518 ,  H01L29/778 ,  Y10T428/24355

Abstract: An insulating sheet has a heterogeneous laminated structure, and includes a graphene sheet and a hexagonal boron nitride sheet on the graphene sheet, the hexagonal boron nitride sheet having a root mean square (RMS) surface roughness of about 0.5 nm or less in a region having an area of about 200 nm×200 nm or less, and one or more of longitudinal and transverse lengths of about 1 mm or more.

Abstract translation: 绝缘片具有非均匀的层叠结构，并且在石墨烯片上包括石墨烯片和六方氮化硼片，所述六方氮化硼片具有约0.5nm或更小的均方根（RMS）表面粗糙度，在具有 约200nm×200nm或更小的面积，以及约1mm或更大的纵向和横向长度中的一个或多个。