公开(公告)号：US20240416529A1

公开(公告)日：2024-12-19

申请号：US18522855

申请日：2023-11-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyunghoon Joo ,  Sunghyup Kim ,  Kiho Lee ,  Sanghoon Lee

IPC: B25J15/00 ,  H01L21/687

Abstract: A robot blade may include a blade body and a frequency variator. The blade body may include a frequency variation groove. The frequency variator may be detachably arranged in the frequency variation groove to vary a frequency of the blade body. Thus, the robot blade may have a changed shape by removing at least one frequency variation block included in the frequency variator. Therefore, the robot blade having the changed shape may have a frequency different from a frequency of a part in semiconductor fabrication equipment to prevent a resonance. As a result, a vibration of the robot blade may be suppressed to prevent damage to a semiconductor substrate.