公开(公告)号：US20180129141A1

公开(公告)日：2018-05-10

申请号：US15610802

申请日：2017-06-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jong-In LEE ,  Sang-lk CHA

IPC: G03F7/20

CPC classification number: G03F7/70733 ,  G03F7/70741 ,  H01L21/67733

Abstract: A transferring apparatus for transferring an object in a ceiling of a manufacturing line includes a travelling part configured to transfer the object along a desired travelling path provided in the ceiling, and an auxiliary support part configured to prevent the object from falling down while the traveling part travels. The auxiliary support part includes a linkage portion in a lower end portion of a frame which extends downwardly from the travelling part and including a horizontally spreadable link structure toward a bottom surface of the object, and a driving portion provided in the frame to provide a driving force for driving the linkage portion.