公开(公告)号：US20210066034A1

公开(公告)日：2021-03-04

申请号：US16821249

申请日：2020-03-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongmin CHO ,  Taeyong LEE ,  Sangkyo LIM

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/20 ,  H01J37/22 ,  H01J37/21

Abstract: A scanning electron microscope apparatus including an electron gun configured to generate an electron beam, a focusing lens configured to concentrate the electron beam from the electron gun, an electron detector configured to detect signals emitted from a sample in response to the electron beam incident on the sample, a stage configured to receive the sample thereon, and a focus calibration structure on an upper part of the stage.