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公开(公告)号：US20230288799A1
公开(公告)日：2023-09-14
申请号：US18061859
申请日：2022-12-05
发明人： Hyungrang Moon , Youngkwon Kim , Ryunmin Heo , Minyoung Lee , Minsoo Kim , Kyuwon Lee , Jung Min Choi , Cheol Hong Park , Moohyun Koh , Sang Won Bae , Jungah Kim
CPC分类号： G03F7/0042 , G03F7/162 , G03F7/168 , G03F7/325
摘要： A method of forming patterns includes coating a metal-containing resist composition on a substrate, sequentially coating two types of compositions for removing edge beads along an edge of the substrate, performing a heat-treatment including drying and heating to form a metal-containing resist film on the substrate, and exposing and developing the metal-containing resist film to form a resist pattern; or coating a metal-containing resist composition on a substrate, coating a composition for removing edge beads along an edge of the substrate, performing a heat-treatment including drying and heating to form a metal-containing resist film on the substrate, exposing the metal-containing resist film, and developing with a developing solution composition to form a resist pattern, wherein details of the two types of compositions for removing edge beads and the developing solution composition are as described in the specification.
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公开(公告)号：US11775729B2
公开(公告)日：2023-10-03
申请号：US17381499
申请日：2021-07-21
发明人： Phaniraj Joshi , Pilwon Kang , Kyuwon Lee , Youngrog Jo , Zameer Iqbal , Nitin Kishorkumar Ingole
IPC分类号： G06F30/398
CPC分类号： G06F30/398
摘要： A method and system disclosed for validating technology file design rules, including obtaining a technology file with design rules that are to be validated. An input test case library is obtained with design rule cell-views for each corresponding design rules. The design rule cell-view includes a first set of failed test cases. An output data is generated by using Design Rule Driven (DRD) tool, to test the design rules based on the design rule cell-views. The test output data provides a second set of failed test cases associated with the corresponding design rule. A validation result is determined for each of the plurality of design rules based on the first set of failed test cases and the second set of failed test cases associated with the design rule. Finally, a validation report is generated including the validation result for each design rules.
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公开(公告)号：US20220350949A1
公开(公告)日：2022-11-03
申请号：US17381499
申请日：2021-07-21
发明人： Phaniraj Joshi , Pilwon Kang , Kyuwon Lee , Youngrog Jo , Zameer Iqbal , Nitin Kishorkumar Ingole
IPC分类号： G06F30/398
摘要： A method and system disclosed for validating technology file design rules, including obtaining a technology file with design rules that are to be validated. An input test case library is obtained with design rule cell-views for each corresponding design rules. The design rule cell-view includes a first set of failed test cases. An output data is generated by using Design Rule Driven (DRD) tool, to test the design rules based on the design rule cell-views. The test output data provides a second set of failed test cases associated with the corresponding design rule. A validation result is determined for each of the plurality of design rules based on the first set of failed test cases and the second set of failed test cases associated with the design rule. Finally, a validation report is generated including the validation result for each design rules.
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