公开(公告)号：US11002694B2

公开(公告)日：2021-05-11

申请号：US16588374

申请日：2019-09-30

Applicant: Scienta Omicron AB

Inventor： Tomas Wiell ,  Cristopher Liljenberg ,  Pål Palmgren

IPC: G01N23/00 ,  G01N23/2273 ,  H01J37/21 ,  H01J37/256

Abstract: The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray source providing a beam of photons which is directed through the system so as to excite electrons from an illuminated sample. An X-ray tube is connected to a monochromator vacuum chamber in which a crystal is configured to monochromatize and focus the beam onto an illuminated sample. A hemispherical electron energy analyser is mounted onto the analysis chamber. An air gap is provided between the X-ray tube and the monochromator chamber, which air gap is provided with a first radiation trap to shield the ambient air from the radiation when the air gap is illuminated with X-rays from the source.