公开(公告)号：US20230314351A1

公开(公告)日：2023-10-05

申请号：US18012209

申请日：2021-06-10

Applicant: Scienta Omicron AB

Inventor： Jan KNUDSEN

IPC: G01N23/227

CPC classification number: G01N23/227

Abstract: A computer-implemented method is described for generating event-averaged and time-resolved spectra, from a plurality of time-resolved spectra of charged particles emitted from a surface (3) of a sample (2), at which surface (3) an event is repeated cyclically, the method comprising the steps of receiving (101), from the charged particle analyser (1), the plurality of time-resolved spectra covering a plurality of events, obtaining (102) at least one selected part (9, 10) of the series of time-resolved spectra, matching (103) the at least one selected part (9, 10) with other parts of the series of time-resolved spectra to find similar parts, and thereby determining points in time for other events in the plurality of events, and generating (104) the event-averaged and time-resolved spectra of the event based on the series of time-resolved charged particle energy spectra and the determined points in time.