公开(公告)号：US20210090857A1

公开(公告)日：2021-03-25

申请号：US16990112

申请日：2020-08-11

Applicant: Seagate Technology LLC

Inventor： Minna Hovinen ,  Mathias Schubert ,  Gerald Finken ,  Greg Schmitz ,  Tino Hofmann ,  Stefan Schöche

IPC: H01J37/305 ,  G01N21/21 ,  G01N21/3581

Abstract: Methods that include directing an incident beam towards a substrate, the substrate having one or more features formed thereon wherein the incident beam has a wavelength from about 10 μm to about 10 mm, and the incident beam interacts with the substrate to form a modulated beam; varying one or more characteristics of the incident beam while directed towards the substrate; detecting the modulated beam while varying the one or more characteristics of the incident beam to collect a spectrum; and determining at least one spatial metric of the at least one feature based on the collected spectrum.