公开(公告)号：US20190084306A1

公开(公告)日：2019-03-21

申请号：US16135352

申请日：2018-09-19

申请人： Seiko Epson Corporation

发明人： Koichi MOROZUMI ,  Hiromu MIYAZAWA ,  Hiroshi KATO ,  Hiroshi ITO

IPC分类号： B41J2/14 ,  H01L41/047 ,  H01L41/187 ,  H01L41/311

摘要： A piezoelectric element including a piezoelectric layer having a perovskite structure including lead, zirconium, and titanium, and an electrode provided on the piezoelectric layer is provided. In the piezoelectric layer, in a range of 50 nm or smaller from an interface between the piezoelectric layer and the electrode in a thickness direction, a ratio c/a of a lattice spacing a in a direction perpendicular to the thickness direction and a lattice spacing c in the thickness direction satisfies 0.986≤c/a≤1.014.

公开(公告)号：US20190077150A1

公开(公告)日：2019-03-14

申请号：US16127770

申请日：2018-09-11

申请人： SEIKO EPSON CORPORATION

发明人： Tsutomu NISHIWAKI ,  Hiroshi KATO ,  Tsutomu ASAKAWA

IPC分类号： B41J2/14 ,  B06B1/06 ,  G01N29/24

摘要： A liquid discharge head includes a pressure chamber that accommodates a liquid, a diaphragm that forms a wall surface of the pressure chamber, and a piezoelectric element that is provided on an opposite side of the pressure chamber with the diaphragm interposed between the piezoelectric element and the pressure chamber and vibrates the diaphragm. The diaphragm includes a silicon oxynitride layer formed with including silicon oxynitride.

公开(公告)号：US20190092016A1

公开(公告)日：2019-03-28

申请号：US16133394

申请日：2018-09-17

申请人： SEIKO EPSON CORPORATION

发明人： Ichiro ASAOKA ,  Eiju HIRAI ,  Tsutomu NISHIWAKI ,  Hiroshi KATO

IPC分类号： B41J2/14 ,  H01L41/047

摘要： Provided is a liquid ejecting head including a pressure chamber to accommodate a liquid, a vibration plate, a nozzle to eject the liquid, and a piezoelectric element. The piezoelectric element includes a piezoelectric body layer, a first electrode disposed on one surface of the piezoelectric body layer, and a second electrode disposed on the other surface of the piezoelectric body layer. The liquid ejecting head further includes wiring connected to the second electrode and extended along a surface direction of the piezoelectric body layer, and does not include a metal layer having the same potential as the first electrode in a first area which is an area positioned between the wiring and the vibration plate and in which the wiring overlaps with none of the second electrode and the piezoelectric body layer in a direction perpendicular to a surface direction of the second electrode.