公开(公告)号：US11714356B2

公开(公告)日：2023-08-01

申请号：US17469366

申请日：2021-09-08

Applicant: Semes Co., Ltd

Inventor： Jun Ho Kim ,  Sang Hoon Lee ,  Jong Seok Seo ,  Ho Jin Jang ,  Gyeong Won Song

IPC: G03F7/40 ,  G03F7/20 ,  G03F7/00 ,  G03F7/38

CPC classification number: G03F7/40 ,  G03F7/38 ,  G03F7/70933

Abstract: The inventive concept provides a bake unit. The bake unit comprising: a housing having an upper cover and a lower frame, the upper cover and the lower cover in combination providing a treatment space for heat treatment of a substrate; a heater provided in the treatment space for heating a substrate placed thereon; a heater cup configured to surround the heater; and a first purge gas supply unit for providing a first purge gas flow to block inflow of outer air through a gap between the lower frame and the heater cup.