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公开(公告)号:US11714356B2
公开(公告)日:2023-08-01
申请号:US17469366
申请日:2021-09-08
Applicant: Semes Co., Ltd
Inventor: Jun Ho Kim , Sang Hoon Lee , Jong Seok Seo , Ho Jin Jang , Gyeong Won Song
CPC classification number: G03F7/40 , G03F7/38 , G03F7/70933
Abstract: The inventive concept provides a bake unit. The bake unit comprising: a housing having an upper cover and a lower frame, the upper cover and the lower cover in combination providing a treatment space for heat treatment of a substrate; a heater provided in the treatment space for heating a substrate placed thereon; a heater cup configured to surround the heater; and a first purge gas supply unit for providing a first purge gas flow to block inflow of outer air through a gap between the lower frame and the heater cup.