公开(公告)号：US20110187063A1

公开(公告)日：2011-08-04

申请号：US13035007

申请日：2011-02-25

Applicant: Seok-Hee SHIM

Inventor： Seok-Hee SHIM

IPC: B23B31/02

CPC classification number: H01L21/6831 ,  H01L21/67092 ,  H01L21/6875 ,  Y10S29/90 ,  Y10T29/49126 ,  Y10T29/49133 ,  Y10T29/53265 ,  Y10T279/34

Abstract: An adhesive chuck, and an apparatus and method for assembling substrates using the same are disclosed. The apparatus comprises a chamber, a first adhesive chuck inside the chamber and having a plurality of adhesive protrusions to adhere to a first substrate conveyed from an outside into the chamber via an intermolecular attractive force, and a driving unit to move the first substrate adhered to the first adhesive chuck and a second substrate toward each other to be compressed and assembled to each other. The apparatus can achieve adhesion and separation of a substrate with minimal power consumption, enhancing an to operating efficiency. Additionally, the adhesive chuck can overcome a problem of spot generation on a display panel caused by remaining static electricity. Furthermore, since the adhesive chuck is almost free from a problem of electric instability, it can exhibit high stability and efficiency and can be fabricated at lower costs.

Abstract translation: 公开了一种粘合卡盘，以及用于组装使用其的基板的装置和方法。 该装置包括腔室，腔室内的第一粘合卡盘，并且具有多个粘合突起，以通过分子间吸引力粘附到从外部输送到腔室中的第一基底;以及驱动单元，用于将第一基底粘附到 第一粘合剂卡盘和彼此朝向彼此压缩和组装的第二基板。 该设备可以以最小的功耗实现基板的粘合和分离，从而提高了操作效率。 此外，粘合卡盘可以克服由剩余静电引起的显示面板上的斑点产生的问题。 此外，由于粘合卡盘几乎没有电不稳定性的问题，因此可以表现出高的稳定性和效率，并且可以以较低的成本制造。