Multi-channel optical switch
    1.
    发明申请
    Multi-channel optical switch 审中-公开
    多通道光开关

    公开(公告)号:US20050008285A1

    公开(公告)日:2005-01-13

    申请号:US10843062

    申请日:2004-05-11

    IPC分类号: G02B26/08 G02B6/35 G02B6/26

    摘要: An optical switch enabling optical communications between an input port and an output port of an optical waveguide by minimizing loss error of an optical signal without using a collimator comprised of a separate mediate optical waveguide, lens or the like is provided. The multi-channel optical switch, which changes optical paths, includes four pairs of input optical waveguides and output optical waveguide arranged in parallel to each other, the first pair of input optical waveguide and output optical waveguide facing the second pair of input optical waveguide and output optical waveguide at an angle of 90 degrees, the first input optical waveguide being installed to correspond to the second output optical waveguide, four mirrors installed to enter in optical path directions between the four pairs of input optical waveguides and output optical waveguides, thereby changing the optical paths, and a mirror actuator for selectively operating the entering of the mirror.

    摘要翻译: 提供了一种通过使光信号的损耗误差最小化而不使用由单独的中介光波导,透镜等构成的准直器来实现光波导的输入端口和输出端口之间的光通信的光开关。 改变光路的多通道光开关包括彼此并联布置的四对输入光波导和输出光波导,第一对输入光波导和输出光波导面对第二对输入光波导和 输出光波导以90度的角度,第一输入光波导被安装成对应于第二输出光波导,四个反射镜安装成进入四对输入光波导和输出光波导之间的光路方向,从而改变 光路和用于选择性地操作反射镜进入的反光镜致动器。

    Method of manufacturing a nanowire device
    2.
    发明授权
    Method of manufacturing a nanowire device 有权
    制造纳米线器件的方法

    公开(公告)号:US08080481B2

    公开(公告)日:2011-12-20

    申请号:US11533892

    申请日:2006-09-21

    IPC分类号: H01L21/31 H01L21/469

    摘要: The present invention provides a method for manufacturing a semiconductor nanowire device in mass production at a low cost without an additional complex nanowire alignment process or SOI substrate by forming a single crystal silicon nanowire with a simple process without forming an ultra fine pattern using an electron beam and transferring the nanowire separated from the substrate to another oxidation layer or insulation substrate. And also, the present invention suggests a method for simply manufacturing a nanowire device transferring the nanowire from a semiconductor substrate formed thereon the nanowire to another substrate formed thereon an insulation layer or the like.

    摘要翻译: 本发明提供了一种以低成本批量生产半导体纳米线器件的方法,而无需额外的复合纳米线取向工艺或SOI衬底,通过以简单的工艺形成单晶硅纳米线,而不需要使用电子束形成超细纹 并将从衬底分离的纳米线转移到另一个氧化层或绝缘衬底。 此外,本发明还提出了一种简单地制造将纳米线从其上形成的半导体衬底转移到其上形成有绝缘层等的另一衬底的纳米线器件的方法。