APPARATUS FOR MEASURING WARPAGE CHARACTERISTIC OF SPECIMEN
    1.
    发明申请
    APPARATUS FOR MEASURING WARPAGE CHARACTERISTIC OF SPECIMEN 审中-公开
    用于测量样品的温度特性的装置

    公开(公告)号:US20130100460A1

    公开(公告)日:2013-04-25

    申请号:US13411286

    申请日:2012-03-02

    IPC分类号: G01B11/25

    CPC分类号: G01B11/25 G01B11/306

    摘要: There is provided an apparatus for measuring a warpage characteristic of a specimen, the apparatus including: a light irradiating unit irradiating light toward the specimen; alight transmitting member transmitting the light irradiated by the light irradiating unit therethrough and including a reference lattice pattern to allow a shadow to be formed on the specimen; a sensing unit sensing the shadow formed on the specimen by the reference lattice pattern; and a heating plate disposed under the light transmitting member and heating the specimen mounted thereon, wherein the reference lattice pattern formed on the light transmitting member is formed of a conductive material and is connected to a power supplying unit to thereby generate heat when power is supplied.

    摘要翻译: 提供了一种用于测量试样的翘曲特性的装置,该装置包括:将光照射到试样的光照射单元; 透光构件透射由照射单元照射的光,并且包括参考点阵图案,以允许在样本上形成阴影; 感测单元,通过参考点阵图案感测在样本上形成的阴影; 以及加热板,其设置在所述透光部件的下方并加热安装在其上的试样,其中形成在所述透光部件上的所述参考格子图案由导电材料形成,并且连接到供电单元,从而在供电时产生热量 。

    Optical parametric oscillator
    2.
    发明申请
    Optical parametric oscillator 审中-公开
    光参量振荡器

    公开(公告)号:US20080304136A1

    公开(公告)日:2008-12-11

    申请号:US12155584

    申请日:2008-06-06

    IPC分类号: G02F1/35

    摘要: There is provided an optical parametric oscillator capable of converting a wavelength in a broader range and generating an output beam with high efficiency. The optical parametric oscillator includes: a non-linear optical material optical parametrically converting a beam pumped from a laser; and input and output optical devices opposing each other, the input and output optical devices guiding the optical parametrically-converted beam to the non-linear optical material to oscillate, wherein the input optical device includes an input optical mirror guiding the pumping beam into the oscillator, and the output optical device includes a plurality of output optical mirrors each guiding the optical parametrically-converted beam outside the oscillator, the output optical mirrors having reflectivities different from one another with respect to a wavelength of the optical parametrically-converted beam.

    摘要翻译: 提供了能够在更宽范围内转换波长并且以高效率产生输出光束的光学参量振荡器。 所述光学参量振荡器包括:光学参量地转换从激光器泵浦的光束的非线性光学材料; 以及彼此相对的输入和输出光学器件,所述输入和输出光学器件将所述光学参量转换的光束引导到所述非线性光学材料以进行振荡,其中所述输入光学器件包括将所述泵浦光束引导到所述振荡器中的输入光学镜 并且输出光学装置包括多个输出光学镜,每个输出光镜将光学参量化转换的光束引导到振荡器外部,输出光学镜具有相对于光参量转换光束的波长彼此不同的反射率。