公开(公告)号：US20110137583A1

公开(公告)日：2011-06-09

申请号：US12634629

申请日：2009-12-09

申请人： Sherk CHUNG ,  James MacAllen CHALMERS ,  Jialing CHEN ,  Yi WANG ,  Paul TRAN ,  Sophia Leonidovna SHTILMAN ,  Joseph R. MONKOWSKI

发明人： Sherk CHUNG ,  James MacAllen CHALMERS ,  Jialing CHEN ,  Yi WANG ,  Paul TRAN ,  Sophia Leonidovna SHTILMAN ,  Joseph R. MONKOWSKI

IPC分类号： G01F1/34

CPC分类号： G01F1/34 ,  G01F15/046 ,  Y10T137/0324

摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.

公开(公告)号：US20120132291A1

公开(公告)日：2012-05-31

申请号：US13306940

申请日：2011-11-29

申请人： Joseph R. MONKOWSKI ,  Adam J. MONKOWSKI ,  Jialing CHEN ,  Tao DING

发明人： Joseph R. MONKOWSKI ,  Adam J. MONKOWSKI ,  Jialing CHEN ,  Tao DING

IPC分类号： F15D1/00

CPC分类号： F15D1/025 ,  G01F25/003 ,  G01F25/0053 ,  G05D7/0635 ,  G05D16/202 ,  Y10T137/0396 ,  Y10T137/8158

摘要： An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.

摘要翻译： 一种测量质量流量控制器（MFC）的瞬态响应的装置。 控制MFC上游的可变孔口的尺寸，使得孔口和MFC之间的压力在MFC经历其瞬态响应的整个时间内保持恒定。 孔口的尺寸和通过其的流动之间的已知关系允许确定MFC的瞬态响应。