DEFECT DETECTION DEVICE AND DEFECT DETECTION METHOD

    公开(公告)号:US20230125289A1

    公开(公告)日:2023-04-27

    申请号:US17969661

    申请日:2022-10-19

    Inventor: Masuto KITAMURA

    Abstract: An exciter (11, 12) induces an elastic wave in a test object by sequentially giving the object multiple kinds of vibrations having different frequencies. An illuminator (13, 14) performs stroboscopic illumination on a measurement area on the surface of the object. A displacement measurer (15) controls the timing of the stroboscopic illumination with respect to the phase of the elastic wave for each kind of vibration to perform a batch measurement of the displacements, in the off-plane direction of the surface, of the points within the measurement area at least at three different phases of the elastic wave, using speckle interferometry or speckle-shearing interferometry.

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