公开(公告)号：US20040036950A1

公开(公告)日：2004-02-26

申请号：US10225370

申请日：2002-08-20

Applicant: Silicon Light Machines

Inventor： Jim Hunter ,  David Amm ,  Christopher Gudeman

IPC: G02B026/00

CPC classification number: G02B26/0808

Abstract: An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Abstract translation: 公开了一种使用被配置为调制光的单独可寻址的色带对的光学MEM器件。 带对优选地包括具有反射铝层的氮化硅，其中来自每个带对的至少一个带与驱动电路电连通，用于可控地单独地对着带对。 带优选地配置成调制适于显示和光通信技术的波长在0.4至2.0微米范围内的光。 该系统优选地包括用于将光传输到单独可寻址的色带对并用于从单独可寻址的色带对传送反射光的光纤。

公开(公告)号：US20030035215A1

公开(公告)日：2003-02-20

申请号：US09930838

申请日：2001-08-15

Applicant: Silicon Light Machines

Inventor： David T. Amm ,  Jahja Trisnadi ,  James Hunter ,  Christopher Gudeman ,  Dinesh Maheshwari

IPC: G02F001/03 ,  G02F001/07 ,  G02B005/18

CPC classification number: G02B26/0808

Abstract: A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate. A relative height of the blazed portions are adjusted to produce the second diffraction when a second electrical bias is applied between the first conductive elements and the substrate. In an alternative embodiment, each of the elongated elements includes the first conductive element and multiple elongated elements are arranged in groupings, where each of the groupings includes at least three of the elongated elements. When the multiple elongated elements are at a first height, the incident light reflects from the elongated elements. When relative heights of the multiple elongated elements are adjusted by applying individual electrical biases between the first conductive elements and the substrate, the incident light diffracts into the single diffraction order.