公开(公告)号：US20230395416A1

公开(公告)日：2023-12-07

申请号：US18205874

申请日：2023-06-05

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Tatsuru Ogawa ,  Yuki Ishihara ,  Shinpei Kogiso ,  Tatsuya Miura ,  Atsushi Suzuki ,  Yuki Matsumoto

IPC: H01L21/677

CPC classification number: H01L21/67775 ,  H01L21/67778 ,  H01L21/67772 ,  H01L21/67793

Abstract: A load port for loading and unloading substrates between a transport chamber and a storage container includes: a plate-like portion constituting a wall surface of the transport chamber and including an opening in communication with an interior of the transport chamber; a stage configured to mount the storage container thereon such that a lid of the storage container faces a door of the opening; and a controller configured to control a driving device that moves the stage forward and rearward with respect to the plate-like portion, wherein the controller is further configured to control, when moving the stage toward the plate-like portion, the driving device to: apply a first thrust directed toward the plate-like portion to the stage until immediately before the stage reaches a predetermined position; and then apply a second thrust, which is greater than the first thrust and directed toward the plate-like portion, to the stage.

公开(公告)号：US20240145285A1

公开(公告)日：2024-05-02

申请号：US18383938

申请日：2023-10-26

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Tatsuru Ogawa ,  Yuki Ishihara ,  Shinpei Kogiso ,  Atsushi Suzuki ,  Yuki Matsumoto ,  Tatsuya Miura

IPC: H01L21/677

CPC classification number: H01L21/67706 ,  H01L21/67772

Abstract: A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller configured to move together with the door member; a guide surface bent to extend from a first direction to a second direction and configured to guide the guide roller; a drive member to which the other end of the link member is rotatably connected; and a driver configured to move the drive member in the second direction.

公开(公告)号：US20230415936A1

公开(公告)日：2023-12-28

申请号：US18212791

申请日：2023-06-22

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Tatsuya Miura ,  Shinpei Kogiso ,  Yuki Ishihara ,  Tatsuru Ogawa ,  Atsushi Suzuki ,  Yuki Matsumoto

IPC: B65B7/16 ,  B65B69/00

CPC classification number: B65B7/16 ,  B65B69/00

Abstract: A load port connected to a transport part includes: a base constituting a portion of a wall of the transport part; a stage on which a storage container is mounted; a stage driving mechanism configured to move the stage in a direction toward or away from the base; a door configured to be capable of opening/closing an opening of the base at a position facing a lid of the storage container mounted on the stage and to be capable of holding the lid disposed to face the opening in a state of closing the opening; a door driving mechanism configured to move the door between an opening position and a closing position; and a movement restricting part configured to restrict a movement of the stage in the direction away from the base by abutting against the stage.