公开(公告)号：US20240302305A1

公开(公告)日：2024-09-12

申请号：US18279287

申请日：2021-04-28

申请人： Sumitomo Electric Industries, Ltd.

发明人： Yutaka HOSHINA ,  Kazuya TOKUDA ,  Yoshihiro SAITO

IPC分类号： G01N23/2273

CPC分类号： G01N23/2273 ,  G01N2223/6116 ,  G01N2223/646

摘要： A data analysis device includes an input unit that receives a measured value of an optoelectronic signal from a photoelectron spectroscopic device measuring the optoelectronic signal generated from a sample by photoelectron spectroscopy and an analysis unit that analyzes the depth profile of the sample by minimizing a sum of square deviations between a theoretical value of the optoelectronic signal and the measured value of the optoelectronic signal using the theoretical value of the optoelectronic signal when the sample is modeled into a multilayer body including a plurality of layers. The analysis unit calculates a relative concentration so as to satisfy a maximum smoothness condition that the relative concentration of the chemical species of the sample smoothly changes in the plurality of layers of the multilayer body in minimizing the sum of square deviations.