公开(公告)号：US20170272049A1

公开(公告)日：2017-09-21

申请号：US15447691

申请日：2017-03-02

Applicant: TAIYO YUDEN CO., LTD.

Inventor： Osamu KAWACHI ,  Rei OIKAWA

IPC: H03H9/72 ,  H03H9/02 ,  H03H9/64

CPC classification number: H03H9/02007 ,  H03H9/02535 ,  H03H9/02574 ,  H03H9/02866 ,  H03H9/64 ,  H03H9/725

Abstract: An acoustic wave device includes: a piezoelectric substrate that is made of a single crystal piezoelectric material, and includes a first region including an upper surface, and a second region that is located under the first region and has a density less than a density of the first region; and an IDT located on the upper surface of the piezoelectric substrate.

公开(公告)号：US20190326878A1

公开(公告)日：2019-10-24

申请号：US16375512

申请日：2019-04-04

Applicant: TAIYO YUDEN CO., LTD.

Inventor： Naoki KAKITA ,  Osamu KAWACHI ,  Rei OIKAWA

IPC: H03H9/02 ,  H01L41/047 ,  H01L41/083 ,  H01L41/312 ,  H03H3/08

Abstract: An acoustic wave resonator includes: a support substrate; a piezoelectric substrate located on the support substrate; a first amorphous layer that is in contact with the support substrate and is mainly composed of one or more constituent elements of the support substrate; a second amorphous layer that is in contact with the piezoelectric substrate and the first amorphous layer, is mainly composed of one or more constituent elements of the piezoelectric substrate, and is thinner than the first amorphous layer; and a pair of comb-shaped electrodes that is located on an opposite surface of the piezoelectric substrate from the support substrate, each of the pair of comb-shaped electrodes including electrode fingers.