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公开(公告)号:US20250018440A1
公开(公告)日:2025-01-16
申请号:US18548574
申请日:2023-07-18
Inventor: Mengcheng QU , Rui WU , Zhijun WU , Jingen CAO , Zhengping LU , Dongxiao ZHU , Wei JIANG , Liang YAN , Chunjuan CHEN , Xuejing MI , Liwei JIANG
Abstract: An all-in-one wafer cleaning machine for monocrystalline silicon production includes: a circulation track disposed at a rear end of a cleaning equipment main body and fixed to the cleaning equipment main body; a horizontal moving device disposed at an outer side of the circulation track; a first motor fixedly installed at one end inside the horizontal moving device; a first transmission gear disposed at an output end of the first motor; a first fixed rod fixedly disposed at the other end of the horizontal moving device; a first fixed gear disposed at one end of the first fixed rod, wherein the first transmission gear and the first fixed gear are engaged with the circulating track; and a vertical track fixedly disposed at the horizontal moving device.