公开(公告)号：US11597647B2

公开(公告)日：2023-03-07

申请号：US17116884

申请日：2020-12-09

申请人： TDK Corporation

发明人： Andreas Barbul ,  Matthias Schmidt ,  Matthias König

IPC分类号： B81B7/00 ,  H01L23/00 ,  B81C1/00 ,  H01L21/48 ,  H01L23/10 ,  H01L23/08

摘要： In an embodiment A package includes a casing having an opening and enclosing a cavity, a die accommodated in the cavity and a membrane attached to the casing, the membrane being air-permeable, covering and sealing the opening, wherein the membrane is configured to allow only a lateral gas flow, and wherein a blocking member is configured to block a vertical gas flow through the membrane into the cavity, the blocking member tightly covering a surface of the membrane at least in an area comprising the opening.

公开(公告)号：US11543381B2

公开(公告)日：2023-01-03

申请号：US16913793

申请日：2020-06-26

申请人： TDK Corporation

发明人： Andreas Barbul ,  Matthias König

IPC分类号： G01N27/414 ,  G01N33/00 ,  G06N3/04 ,  G06N3/08 ,  G06N3/063

摘要： A method and apparatus for operating a gas sensor are disclosed. In an embodiment a method for operating a gas sensor includes providing, by at least one gas sensor element, a sensing signal and correcting, by a neural network, the sensing signal, wherein the neural network comprises an input layer, an output layer and at least one hidden layer, wherein the input layer comprises a given number k>1 of input neurons for each gas sensor element, and wherein a respective gas sensor element provides its sensing signal to one of the corresponding input neurons dependent on a measurement parameter applied to the at least one gas sensor element.

公开(公告)号：US11467110B2

公开(公告)日：2022-10-11

申请号：US16574434

申请日：2019-09-18

申请人： TDK CORPORATION

发明人： Matthias König

IPC分类号： G01N27/16 ,  G01N25/18 ,  G01N33/00

摘要： A method for operating a sensor device for measuring a concentration of a gas species in a gas is disclosed. In an embodiment, the method includes recording a set of data points by performing a plurality of measurements of a temperature sensor element reading, wherein each of the measurements is performed with a different heater setting of the first pellistor element and each of the measurements results in a data point of the set of data points, performing a curve fit of an evaluation function to the set of data points, wherein the evaluation function comprises a first function and a second function, wherein the first function is based on an ideal behavior of the first pellistor element, and wherein the second function is a temperature-dependent steadily rising or steadily falling function and determining the concentration of the gas species in the gas from the curve fit.

公开(公告)号：US11927582B2

公开(公告)日：2024-03-12

申请号：US17032734

申请日：2020-09-25

申请人： TDK Corporation

发明人： Matthias König

IPC分类号： G01N33/00

CPC分类号： G01N33/007 ,  G01N33/0016 ,  G01N2033/0072

摘要： A method for testing a gas sensor and a gas sensor are disclosed. In an embodiment a method for testing at least one gas sensor includes exposing in a first measurement the gas sensor to a test gas under first gas conditions including a first pressure and exposing in a second measurement the gas sensor to the test gas under second gas conditions including a second pressure, the second gas conditions being different from the first gas conditions, wherein the second pressure is different from the first pressure, and/or wherein the gas sensor is exposed to an intermediate pressure different from the first pressure between the first measurement and the second measurement.

公开(公告)号：US20220299461A1

公开(公告)日：2022-09-22

申请号：US17692990

申请日：2022-03-11

申请人： TDK Corporation

发明人： Andreas Barbul ,  Matthias König

IPC分类号： G01N27/16 ,  G01N27/18

摘要： A heat meander is disclosed. In an embodiment a heater meander includes a meander structure, wherein central meander lines of the meander structure are thicker than meander lines in an outer area of the meander structure.

公开(公告)号：US20210238028A1

公开(公告)日：2021-08-05

申请号：US17116884

申请日：2020-12-09

申请人： TDK Corporation

发明人： Andreas Barbul ,  Matthias Schmidt ,  Matthias König

IPC分类号： B81B7/00 ,  H01L23/10 ,  H01L23/00 ,  B81C1/00 ,  H01L21/48

摘要： In an embodiment A package includes a casing having an opening and enclosing a cavity, a die accommodated in the cavity and a membrane attached to the casing, the membrane being air-permeable, covering and sealing the opening, wherein the membrane is configured to allow only a lateral gas flow, and wherein a blocking member is configured to block a vertical gas flow through the membrane into the cavity, the blocking member tightly covering a surface of the membrane at least in an area comprising the opening.

公开(公告)号：US20210096115A1

公开(公告)日：2021-04-01

申请号：US17032734

申请日：2020-09-25

申请人： TDK Corporation

发明人： Matthias König

IPC分类号： G01N33/00

摘要： A method for testing a gas sensor and a gas sensor are disclosed. In an embodiment a method for testing at least one gas sensor includes exposing in a first measurement the gas sensor to a test gas under first gas conditions including a first pressure and exposing in a second measurement the gas sensor to the test gas under second gas conditions including a second pressure, the second gas conditions being different from the first gas conditions, wherein the second pressure is different from the first pressure, and/or wherein the gas sensor is exposed to an intermediate pressure different from the first pressure between the first measurement and the second measurement.

公开(公告)号：US20200240943A1

公开(公告)日：2020-07-30

申请号：US16649487

申请日：2018-08-01

申请人： TDK Corporation

发明人： Matthias König

IPC分类号： G01N27/12 ,  G01N33/00 ,  B81B7/00 ,  B81C1/00

摘要： A MEMS gas sensor is disclosed. In an embodiment a MEMS gas sensor includes a carrier having a recess, a gas sensitive element arranged in the recess and a shielding layer at least partially covering the recess.

公开(公告)号：US12085526B2

公开(公告)日：2024-09-10

申请号：US16534960

申请日：2019-08-07

申请人： TDK Corporation

发明人： Matthias König ,  Matthias Schmidt ,  Markus Mayr

IPC分类号： G01N27/16 ,  G01N31/10

CPC分类号： G01N27/16 ,  G01N31/10

摘要： A sensor device and an electronic assembly are disclosed. In an embodiment a sensor device includes a first pellistor element, a second pellistor element, a heater element, a first temperature sensor element and a second temperature sensor element, wherein the heater element and the first temperature sensor element are part of the first pellistor element and the heater element and the second temperature sensor element are part of the second pellistor element.

公开(公告)号：US11898979B2

公开(公告)日：2024-02-13

申请号：US17031242

申请日：2020-09-24

申请人： TDK Corporation

发明人： Matthias König

IPC分类号： G01N27/16 ,  G01N33/00 ,  G01N27/12

CPC分类号： G01N27/16 ,  G01N27/123 ,  G01N33/0027

摘要： A gas sensor with improved sensitivity. The gas sensor comprises an active sensor unit, a reference sensor unit and a temperature control circuit. The active sensor unit has an active detector. The reference sensor unit has a reference detector. The temperature control circuit is provided and configured to keep a detector at a predetermined temperature.