公开(公告)号：US20190188839A1

公开(公告)日：2019-06-20

申请号：US15847600

申请日：2017-12-19

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Elizabeth C. STEWART ,  Young Sawk OH ,  Zhiyi YU ,  Jeffrey A. WEST ,  Thomas D. BONIFIELD

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/30148

Abstract: A method comprises obtaining a wafer comprising a plurality of components, wherein each of the plurality of components exposes a first surface of the component present in a first focal plane and a second surface of the component present in a second focal plane. The method comprises generating, by an optical tool, a first image of the first surface and a second image of the second surface of one of the plurality of components. The method comprises comparing, by a processor, the first image with a first reference image to produce a first value and the second image with a second reference image to produce a second value. The method comprises generating, by the processor, a wafer map indicating a quality state of the one of the plurality of components based on the first and second values.