公开(公告)号：US20230078156A1

公开(公告)日：2023-03-16

申请号：US17472947

申请日：2021-09-13

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Patrick Ian ODEN ,  James Norman HALL

IPC: G02B26/08 ,  G02B6/35

Abstract: In an example, a system includes a digital micromirror device (DMD). The DMD includes a hinge and one or more spring tips coupled to the hinge, where the hinge is configured to tilt toward a raised address electrode. The DMD includes a micromirror including a recessed mirror shelf and a reflective surface, where the recessed mirror shelf is coupled to the hinge, and where the recessed mirror shelf is configured to contact at least one of the one or more spring tips responsive to the hinge tilting toward the raised address electrode.