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公开(公告)号:US11327102B2
公开(公告)日:2022-05-10
申请号:US17001899
申请日:2020-08-25
发明人: James A. Bickford , Stephanie Lynne Golmon , Paul A. Ward , William D. Sawyer , Marc Steven Weinberg , John J. Le Blanc , Louis Kratchman , James S. Pringle, Jr. , Daniel K. Freeman , Amy Duwel , Max Lindsay Turnquist , Ronald Steven McNabb, Jr. , William A. Lenk
IPC分类号: G01R29/12 , G01R1/04 , G01R33/12 , G01R29/08 , G01R27/26 , G01R29/10 , A61B5/24 , A61B5/369 , A61B5/318
摘要: Aspects are generally directed to a compact and low-noise electric field detector, methods of operation, and methods of production thereof. In one example, an electric field detector includes a proof mass, a source of concentrated charge coupled to the proof mass, and a substrate having a substrate offset space defined therein, the proof mass being suspended above the substrate offset space. The electric field detector further includes a sense electrode disposed on the substrate within the substrate offset space and proximate the proof mass, the sense electrode being configured to measure a change in capacitance relative to the proof mass from movement of the proof mass in response to a received electric field at the source of concentrated charge. The electric field detector includes a control circuit coupled to the sense electrode and configured to determine a characteristic of the electric field based on the measured change in capacitance.
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公开(公告)号:US10859620B2
公开(公告)日:2020-12-08
申请号:US15944106
申请日:2018-04-03
发明人: James A. Bickford , Stephanie Lynne Golmon , Paul A. Ward , William D. Sawyer , Marc S. Weinberg , John J. LeBlanc , Louis Kratchman , James S. Pringle, Jr. , Daniel Freeman , Amy Duwel , Max Lindsay Turnquist , Ronald Steven McNabb, Jr. , William A. Lenk
IPC分类号: G01R29/12 , G01R1/04 , G01R33/12 , G01R29/08 , G01R27/26 , A61B5/04 , A61B5/0476 , G01R29/10 , A61B5/0402
摘要: Aspects are generally directed to a compact and low-noise electric field detector, methods of operation, and methods of production thereof. In one example, an electric field detector includes a proof mass, a source of concentrated charge coupled to the proof mass, and a substrate having a substrate offset space defined therein, the proof mass being suspended above the substrate offset space. The electric field detector further includes a sense electrode disposed on the substrate within the substrate offset space and proximate the proof mass, the sense electrode being configured to measure a change in capacitance relative to the proof mass from movement of the proof mass in response to a received electric field at the source of concentrated charge. The electric field detector includes a control circuit coupled to the sense electrode and configured to determine a characteristic of the electric field based on the measured change in capacitance.
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