公开(公告)号：US20170298958A1

公开(公告)日：2017-10-19

申请号：US15485778

申请日：2017-04-12

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tsutomu MOCHIZUKI ,  Kazuhiro CHIBA ,  Ryo MURAKAMI ,  Kazuyuki MIURA

IPC: F04D29/70 ,  B08B7/00 ,  F04D19/04 ,  F04D29/32

Abstract: A heating device for heating a component in a turbo molecular pump for exhausting a gas includes a heat transfer member, a heater, a first seal member and a second seal member. The heat transfer member is provided in an opening of a housing of the turbo molecular pump and has one end fixed to the component and the other end exposed to an outside. The heater in the heat transfer member heats the component through the heat transfer member. The first seal member is provided between the heat transfer member and the opening along an outer peripheral surface of the heat transfer member. The second seal member between the heat transfer member and the opening is located close to the component compared to the first seal member. The second seal member suppresses movement of radicals in a gas into a space between the heat transfer member and the opening.