公开(公告)号：US20220228850A1

公开(公告)日：2022-07-21

申请号：US17614880

申请日：2020-05-25

Applicant: TOPCON CORPORATION ,  RIKEN

Inventor： Homare MOMIYAMA ,  Yoshiaki SASAKI ,  Isao YOSHIMINE ,  Chiko OTANI ,  Tetsuya YUASA

IPC: G01B9/02 ,  G01B9/02091

Abstract: Provided is an optical interference measuring apparatus including a measuring unit for acquiring an interferogram of an interference wave obtained by irradiating a measuring target and a reference surface with electromagnetic waves and causing reflected waves from a reflecting surface of the measurement target and reflected waves from the reference surface to interfere and a signal processing unit for configuring an intensity profile in the depth direction by performing Fourier transform of the interferogram. The signal processing unit is configured to estimate a parameter for a model formula for an assumed surface count, based on the model formula of an interferogram when it is assumed that the measurement target has a predetermined structure, to select an optimal model by a statistical technique from the model formula to which a parameter estimated for the assumed surface count is applied, and to reconfigure an intensity profile based on the optimal model.

公开(公告)号：US20220221266A1

公开(公告)日：2022-07-14

申请号：US17615065

申请日：2020-05-25

Applicant: TOPCON CORPORATION ,  RIKEN

Inventor： Homare MOMIYAMA ,  Yoshiaki SASAKI ,  Isao YOSHIMINE ,  Chiko OTANI ,  Tetsuya YUASA

IPC: G01B9/02 ,  G01B9/02091 ,  G01B9/02055

Abstract: Provided is an optical interference measuring apparatus including a measuring unit configured to acquire an interferogram of an interference wave by irradiating a measurement target and a reference surface with electromagnetic waves and causing a reflected wave from a reflecting surface of the measurement target to interfere with a reflected wave from the reference surface and a signal processing unit configured to configure an intensity profile in a depth direction by performing Fourier transform of the interferogram. The signal processing unit includes at least one of a first noise removal unit to remove noise with filtering by deleting data in regions other than a pass region which is a region set with reference to a measurement target installation position from the intensity profile and a second noise removal unit to remove noise by performing singular value decomposition of the interferogram to delete noise component.