公开(公告)号：US20220223827A1

公开(公告)日：2022-07-14

申请号：US17706541

申请日：2022-03-28

Applicant: TOPPAN INC.

Inventor： Takayuki MORITA

IPC: H01L51/56 ,  C23C16/04 ,  C23F1/02

Abstract: A vapor deposition mask made of metal includes: a front surface configured to oppose a vapor deposition source; and mask holes each including a hole portion having a shape of an inverted frustum. The hole portion of each of the mask holes includes: a small opening including a polygonal edge as seen from a view opposing the front surface of the vapor deposition mask, the edge including corners and linear portions each located between adjacent ones of the corners; and a large opening located on the front surface, the large opening including an edge as seen from the view opposing the front surface of the vapor deposition mask, the edge being shaped such that the corners of the edge of the small opening project outward from the edge of the small opening. The large opening surrounds the small opening as seen from the view opposing the front surface.