公开(公告)号：US20180290093A1

公开(公告)日：2018-10-11

申请号：US15766415

申请日：2016-10-10

Applicant: TOTAL MARKETING SERVICES

Inventor： William BRINKMAN ,  Sabastien RIFFLART

IPC: B01D46/24 ,  B01D46/00

CPC classification number: B01D46/2411 ,  B01D46/0005 ,  B01D46/002 ,  B01D46/0058 ,  B01D2201/16 ,  B01D2201/204 ,  B01D2201/30 ,  B01D2201/32 ,  B01D2257/55 ,  B01D2258/02 ,  B01D2273/28 ,  B01D2277/10 ,  C30B15/00

Abstract: There is provided a Czochralski puller installation for Si monocrystalline ingot growth, including: a Czochralski puller; a SiOx dust filter system; and a vacuum pump connected downstream of said SiOx dust filter system, the SiOx dust filter system including at least a first filtration branch having a first SiOx filter unit, and at least a second filtration branch having a second SiOx filter unit, the first filtration branch and the second filtration branch being disposed in parallel and connected to a common first connection point upstream of first and second upstream valves and to a common second connection point downstream of first and second downstream valves, the first and the second filtration branches being connected through a bypass branch having a needle valve for pressure equilibration between the first and the second filtration branches.