公开(公告)号：US11302560B2

公开(公告)日：2022-04-12

申请号：US17009432

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the third surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US11302559B2

公开(公告)日：2022-04-12

申请号：US17009365

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the fourth surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US11557465B2

公开(公告)日：2023-01-17

申请号：US17009265

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683 ,  H01T23/00 ,  H01J37/32

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is less than an average electrical resistance of the first portion.

公开(公告)号：US11557467B2

公开(公告)日：2023-01-17

申请号：US17009216

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683 ,  H01T23/00 ,  H01J37/32

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is greater than an average electrical resistance of the first portion.