公开(公告)号：US20200219818A1

公开(公告)日：2020-07-09

申请号：US16741649

申请日：2020-01-13

申请人： TRANSFERT PLUS, SOCIETE EN COMMANDITE

发明人： MICHAEL MENARD ,  FREDERIC NABKI ,  MOHAMED RAHIM ,  JONATHAN BRIERE ,  PHILIPPE-OLIVIER BEAULIEU

IPC分类号： H01L23/532 ,  H01L23/528 ,  H01L21/768

摘要： Unlike most MEMS device configurations which simply switch between two positions in many optical devices the state of a MEMS mirror is important in all transition positions. It may determine the characteristics of an optical delay line system and by that an optical coherence tomography system in one application and in another the number of wavelength channels and the dynamic wavelength switching capabilities in the other. The role of the MEMS is essential and it is responsible for altering the paths of the different wavelengths in either device. It would be beneficial to improve the performance of such MEMS and thereby the performance of the optical components and optical systems they form part of. The inventors have established improvements to the design and implementation of such MEMS mirrors as well as optical waveguide technologies to in-plane optical processing as well as the mid infrared for optical spectroscopy.