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公开(公告)号：US3311462A
公开(公告)日：1967-03-28
申请号：US27437163
申请日：1963-04-02
Applicant: TRW SEMICONDUCTORS INC
Inventor： MAIDEN CLINTON E
IPC: H01J5/26
CPC classification number: H01J5/26 , H01J2893/0043
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