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1.发明授权
公开(公告)号：US3307253A
公开(公告)日：1967-03-07
申请号：US18935362
申请日：1962-04-23
Applicant: TRW SEMICONDUCTORS INC
Inventor： WULLENWABER ROBERT W
IPC: H01J5/26
CPC classification number: H01J5/26 , H01J2893/0043 , Y10S29/046 , Y10T29/49838 , Y10T29/49902 , Y10T29/49945 , Y10T29/49998 , Y10T29/53535 , Y10T29/53696
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