公开(公告)号：US07611340B2

公开(公告)日：2009-11-03

申请号：US11878665

申请日：2007-07-26

申请人： Tae-Kyong Hwang ,  Myung Keun Noh ,  Heaung Shig Oh

发明人： Tae-Kyong Hwang ,  Myung Keun Noh ,  Heaung Shig Oh

IPC分类号： F04C18/18 ,  F04C25/02

CPC分类号： F04C18/16 ,  F04C18/084 ,  F04C18/086 ,  F04C18/126 ,  F04C23/005 ,  F04C29/0085 ,  F04C2220/12 ,  F04C2220/30 ,  F04C2280/02 ,  F05C2253/20

摘要： A complex dry vacuum pump including a root rotor and a screw rotor is disclosed for manufacturing semiconductors and/or displays in a vacuum state in a process chamber, and discharging gaseous material and/or by-products generated during manufacturing to the exterior of the process chamber. The pump can provide high gas compression transfer efficiency so as to form a vacuum in the process chamber and/or keep high gas compression transfer efficiency when the gaseous material and/or by-products are discharged. Balance between the root rotor and the screw rotor can prevent vibration and noise generated in the vacuum pump, and molding material associated with the pump may allow a stator coil to be separated and prevent various by-products from flowing from the vacuum pump.

摘要翻译： 公开了一种包括根转子和螺杆转子的复式干式真空泵，用于在处理室中以真空状态制造半导体和/或显示器，并且将在制造过程中产生的气态材料和/或副产物排放到工艺外部 房间。 泵可以提供高的气体压缩传递效率，以便在气体材料和/或副产物排放时在处理室中形成真空和/或保持高的气体压缩传递效率。 根转子和螺杆转子之间的平衡可以防止在真空泵中产生的振动和噪声，并且与泵相关联的模制材料可以允许定子线圈被分离并且防止各种副产物从真空泵流出。