公开(公告)号：US20030220049A1

公开(公告)日：2003-11-27

申请号：US10152470

申请日：2002-05-21

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chih-Ming Chang

IPC: B24B049/00 ,  B24B051/00

CPC classification number: B24B53/017

Abstract: A conditioning disk actuating system for raising and lowering a conditioning disk inside a conditioning head for the conditioning of semiconductor wafer polishing pads. The system includes a fluid-actuated cylinder which is coupled to a travel hub vertically slidably mounted in a travel housing provided inside the conditioning head. The conditioning disk is mounted on the bottom end of a disk shaft carried by the travel hub. The fluid-actuated cylinder is operated to selectively lower and raise the travel hub and conditioning disk to press the disk against the polishing pad and remove the disk from the polishing pad, respectively. A position sensing mechanism may be provided in the conditioning head for revealing the nullupnull or nulldownnull position of the conditioning disk.

Abstract translation: 调节盘驱动系统，用于升高和降低用于调节半导体晶片抛光垫的调节头内的调节盘。 该系统包括流体致动缸，其联接到行星轮毂，该行星轮毂可垂直地可滑动地安装在设置在调节头内部的行进箱体中。 调节盘安装在由旅行集线器承载的盘轴的底端。 操作流体驱动的气缸以选择性地降低和升高行进轮毂和调节盘，以将盘压在抛光垫上并分别从抛光垫移除盘。 可以在调节头中设置位置检测机构，用于露出调节盘的“向上”或“向下”位置。

公开(公告)号：US20040144160A1

公开(公告)日：2004-07-29

申请号：US10354629

申请日：2003-01-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chih-Ming Chang

IPC: G01M003/02

CPC classification number: B24B53/017 ,  B24B49/16

Abstract: A pneumatic testing system or kit for testing the downstroke or reciprocating resistance and the presence of air leaks in an air-actuated, piston-type pad conditioning head of a pad conditioning system used in the conditioning of polishing pads for polishing semiconductor wafer substrates. The pneumatic testing system is pneumatically connected to the air-actuated piston in the conditioning head. The system is operated to drive the piston downwardly in the conditioning head while measuring the resistance imparted against the piston by the O-rings and other components in the conditioning head. A pair of switch timers connected to the circuit are capable of timing reciprocation of the piston in the conditioning head. In another application, the system is used to detect the presence of air leakages in the conditioning head.

Abstract translation: 用于在用于抛光半导体晶片衬底的抛光垫的调理中使用的衬垫调节系统的空气致动的活塞式衬垫调节头中用于测试下行程或往复阻力以及空气泄漏的气动测试系统或套件。 气动测试系统气动连接到调节头中的气动活塞。 操作该系统以在调节头中向下驱动活塞，同时通过O形环和调节头中的其它部件测量施加于活塞的阻力。 连接到电路的一对开关定时器能够定时调节头中活塞的往复运动。 在另一个应用中，该系统用于检测调节头中的空气泄漏的存在。

公开(公告)号：US20030220051A1

公开(公告)日：2003-11-27

申请号：US10301197

申请日：2002-11-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd

Inventor： Chih-Ming Chang

IPC: B24B049/00 ,  B24B051/00 ,  B24B007/00

CPC classification number: B24B53/017

Abstract: A conditioning disk actuating system for raising and lowering a conditioning disk inside a conditioning head for the conditioning of semiconductor wafer polishing pads. The system includes a fluid-actuated cylinder which is coupled to a travel hub vertically slidably mounted in a travel housing provided inside the conditioning head. The conditioning disk is mounted on the bottom end of a disk shaft carried by the travel hub. The fluid-actuated cylinder is operated to selectively lower and raise the travel hub and conditioning disk to press the disk against the polishing pad and remove the disk from the polishing pad, respectively. A position sensing mechanism may be provided in the conditioning head for revealing the nullupnull or nulldownnull position of the conditioning disk.