公开(公告)号：US20170343906A1

公开(公告)日：2017-11-30

申请号：US15168424

申请日：2016-05-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chun-Jung HUANG ,  Chien-Fa LEE ,  Yiang-Luen LIN ,  Sam CHIN

IPC: G03F7/20 ,  G06K7/14 ,  G06K7/10

CPC classification number: G03F7/70741

Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.

公开(公告)号：US20190121245A1

公开(公告)日：2019-04-25

申请号：US16166993

申请日：2018-10-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chun-Jung HUANG ,  Chien-Fa LEE ,  Yiang-Luen LIN ,  Sam CHIN

IPC: G03F7/20 ,  G06K7/10 ,  G06K7/14

Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.