公开(公告)号：US20110227040A1

公开(公告)日：2011-09-22

申请号：US13043842

申请日：2011-03-09

申请人： Takao IWAKI ,  Hiroyuki Wado ,  Yukihiro Takeuchi

发明人： Takao IWAKI ,  Hiroyuki Wado ,  Yukihiro Takeuchi

IPC分类号： H01L29/66 ,  H01L21/02

CPC分类号： G01K7/226 ,  G01K7/223

摘要： A temperature sensor includes a semiconductor substrate and a quantum well structural part disposed on the semiconductor substrate. The semiconductor substrate is made of a plurality of elements. The quantum well structural part has a resistance value that changes with temperature. The quantum well structural part includes a plurality of semiconductor layers made of the elements. The semiconductor layers include a plurality of quantum barrier layers and a quantum well layer disposed between the quantum barrier layers. When the semiconductor substrate has a lattice constant “a,” each of the quantum barrier layers has a lattice constant “b,” and the quantum well layer has a lattice constant “c,” the semiconductor substrate, the quantum barrier layers, and the quantum well layer satisfy a relationship of b

摘要翻译： 温度传感器包括半导体衬底和设置在半导体衬底上的量子阱结构部分。 半导体衬底由多个元件制成。 量子阱结构部分具有随温度变化的电阻值。 量子阱结构部分包括由元件制成的多个半导体层。 半导体层包括多个量子势垒层和设置在量子势垒层之间的量子阱层。 当半导体衬底具有晶格常数“a”时，每个量子势垒层具有晶格常数“b”，并且量子阱层具有晶格常数“c”，半导体衬底，量子势垒层和 量子阱层满足b

公开(公告)号：US20120127482A1

公开(公告)日：2012-05-24

申请号：US13301988

申请日：2011-11-22

申请人： Tomoki TANEMURA ,  Yukihiro TAKEUCHI ,  Takao IWAKI ,  Megumi SUZUKI

发明人： Tomoki TANEMURA ,  Yukihiro TAKEUCHI ,  Takao IWAKI ,  Megumi SUZUKI

IPC分类号： G01B9/02

CPC分类号： G01J3/26

摘要： A Fabry-Perot interferometer includes a fixed mirror structure and a movable mirror structure. The fixed mirror structure has a fixed mirror in a spectral region. The movable mirror structure includes a membrane spaced from the fixed mirror structure. The membrane has a movable mirror in the spectral region and multiple springs arranged one inside the other around the spectral region. A spring constant of the inner spring is less than a spring constant of the outer spring. One of the fixed mirror structure and the membrane has multiple electrodes, and the other of the fixed mirror structure and the membrane has at least one electrode that is paired with the electrodes to form opposing electrode pairs arranged one inside the other around the spectral region. The number of the opposing electrode pairs is equal to the number of the springs.

摘要翻译： 法布里 - 珀罗干涉仪包括固定镜结构和可移动镜结构。 固定镜结构在光谱区域具有固定的反射镜。 可移动镜结构包括与固定镜结构隔开的膜。 膜在光谱区域具有可移动反射镜，并且在光谱区域周围布置有多个弹簧。 内弹簧的弹簧常数小于外弹簧的弹簧常数。 固定镜结构和膜中的一个具有多个电极，固定镜结构和膜中的另一个具有至少一个与电极成对的电极，以在光谱区域周围形成相对的电极对。 相对电极对的数量等于弹簧的数量。